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Equipment Engineer, Plasma Etching and Ion Milling, Microelectronics Research Center

The University of Texas at Austin
paid holidays, sick time, retirement plan
United States, Texas, Austin
101 East 27th Street (Show on map)
Mar 24, 2026

Job Posting Title:

Equipment Engineer, Plasma Etching and Ion Milling, Microelectronics Research Center

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Hiring Department:

Office of the Vice President for Research, Scholarship and Creative Endeavors

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Position Open To:

All Applicants

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Weekly Scheduled Hours:

40

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FLSA Status:

Exempt

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Earliest Start Date:

Immediately

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Position Duration:

Expected to Continue

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Location:

AUSTIN, TX

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Job Details:

General Notes

The Microelectronics Research Center (MRC) laboratories serve users from both universities and corporations across many different fields: electronics, optics, physics, chemistry and astronomy, as well as chemical, mechanical and petroleum engineering. The MRC is more than a clean room with a comprehensive set of advanced nano-fabrication equipment; it is a community of scientists who work together to build advanced technology products and knowledge.

UT Austin offers a competitive benefits package that includes:

  • 100% employer-paid basic medical coverage
  • Retirement contributions
  • Paid vacation and sick time
  • Paid holidays

Please visit ourHuman Resources (HR) websiteto learn more about the total benefits offered.

Purpose

TheEtch Engineerleads development, optimization, and sustainment of advanced etch processes in a shared-user research cleanroom and is responsible for the performance, reliability, and sustainment of dry etching equipment, including plasma etching systems (RIE, ICP), atomic layer etching (ALE) tools, and ion milling systems, in a shareduser cleanroom environment. This role is expected to work as part of a team to ensure optimal tool performance by maintaining tool stability, uptime, safety, and repeatability through calibration, diagnostics, preventive maintenance support, and hardware troubleshooting. The engineer supports advanced microfabrication research and prototyping by ensuring etch tools operate within defined performance specifications and safety requirements, while working closely with process engineers, technicians, vendors, and users for recipe development, experimental design, data analysis, user training, and equipment diagnostics.

Responsibilities

Equipment Performance and Sustainment

  • Maintain and optimize the performance and availability of plasma etching, ALE, and ion milling tools to meet facility uptime and capability targets.

  • Troubleshoot process deviations and tool-related issues using structured root cause analysis.

  • Monitor and control key equipment performance metrics, including plasma stability, RF power delivery, pressure control, gas flow accuracy, temperature control, and endpoint system performance.

  • Perform routine equipment calibration, matching, and performance verification to ensure repeatable and stable operation.

  • Perform diagnostic testing and hardware troubleshooting in coordination with maintenance staff and vendors.

  • Support tool qualification, calibration, acceptance testing, and preventive maintenance activities.

Diagnostics, Troubleshooting, and Repair

  • Diagnose and resolve equipment-related issues impacting etch performance using structured troubleshooting and root cause analysis.

  • Perform hands-on hardware diagnostics and repairs, including replacement of boards, RF components, sensors, valves, vacuum hardware, and mechanical assemblies.

  • Coordinate with vendors and service providers on advanced repairs, corrective maintenance, upgrades, and system modifications.

  • Support planning and execution of preventive maintenance activities to minimize downtime and performance drift.

Process Development and Optimization

  • Assist users to develop, optimize, and document etch processes for a wide range of device structures and materials as needed.

  • Assist users in designing and executing experiments to push tool and process limits in resolution, sidewall quality, and pattern fidelity.

  • Assist users in etch optimization through systematic experimentation and modeling.

Process Awareness and Metrology Support

  • Support process engineers and users by ensuring tools are properly configured and capable of meeting process requirements

  • Utilize metrology data (e.g., SEM, profilometry, ellipsometry, endpoint signals) to validate equipment performance and identify hardware-related trends.

  • Assist with tool qualification, requalification after maintenance, and acceptance testing for new or upgraded systems.

  • Analyze etch and metrology data to support process control and reproducibility.

  • Correlate etch results with up and downstream lithography or deposition outcomes to optimize process results.

Safety Systems and Compliance

  • Oversee equipment-related safety systems associated with toxic and corrosive process gases (e.g., Cl, CF, SF), including gas cabinets, interlocks, exhaust, scrubbers, and leak detection systems.

  • Ensure etching equipment operates in compliance with institutional, regulatory, and cleanroom safety standards.

  • Participate in safety reviews, hazard analyses, and emergency response planning related to etch tool operation.

Documentation and Operational Readiness

  • Develop and maintain equipment-focused documentation, including operating procedures, maintenance records, calibration logs, and performance baselines.

  • Track tool configuration changes, service history, and hardware modifications.

  • User training related to equipment operation, tool limitations, and safe use practices.

  • Provide technical consultation to researchers on etch strategy, design rules, and integration considerations.

Collaboration and Integration

  • Work closely with researchers, engineers, technicians, and integration teams to align equipment performance with research and process needs.

  • Support downstream integration by ensuring etch tools perform consistently for lithography, deposition, and pattern transfer workflows.

  • Contribute to facility planning for tool upgrades, capacity expansion, and long-term equipment lifecycle management.

  • Collaborate with other process engineers, technicians, and researchers to support process transfer, yield improvement, and multi-step process integration.

  • Participate in interdisciplinary projects involving lithography, metrology, etching, and deposition.

Required Qualifications
  • Bachelor's degree in Electrical Engineering, Mechanical Engineering, Materials Science, Physics, or a related field.

  • Minimum of 3 years of experience supporting semiconductor or microfabrication equipment, preferably plasma etching, ALE, or ion milling systems.

  • Strong understanding of etch tool subsystems, including RF power delivery, plasma sources, vacuum systems, gas delivery, temperature control, and motion systems.

  • Strong understanding of etch chemistry and process physics.

  • Demonstrated experience with equipment diagnostics, troubleshooting, and component-level repair.

  • Familiarity with cleanroom operations, vacuum systems, and hazardous gas safety infrastructure.

Relevant education and experience may be substituted as appropriate.

Preferred Qualifications
  • Master's degree in Electrical Engineering, Mechanical Engineering, Materials Science, Physics, or a related field.

  • Experience supporting RIE, ICP, ALE, or ion milling tools in a research, pilot-line, or shared-user cleanroom environment.

  • Familiarity with etch performance metrics (e.g., stability, repeatability, endpoint behavior) from an equipment performance perspective.

  • Experience interfacing with vendors for service, upgrades, and performance optimization.

  • Training or certification in emergency response protocols for hazardous gas incidents.

  • Exposure to data analysis or scripting tools (e.g., Python) for equipment monitoring or performance trending.

  • Prior work in a shared-user research facility or academic cleanroom environment.

  • Demonstrated experience mentoring junior staff in technical or cleanroom environments.

Salary

$90,000 + depending on qualifications

Working Conditions
  • Uniforms and/or personal protection equipment (furnished)

  • May work in all weather conditions

  • May work in extreme temperatures

  • May work around chemical fumes

  • May work around standard office conditions

  • May work around biohazards

  • May work around chemicals

  • May work around electrical and mechanical hazards

  • Use of manual dexterity

  • Climbing of stairs

  • Climbing of ladders

  • Lifting and moving

  • Occasional weekend, overtime and evening work to meet deadlines

  • Field work as necessary

  • Cleanroom Environment

  • Yellow lighting in Lithography areas

  • Noisy environment

Required Materials

Please mark "yes" on the application for required materials.Failure to attach all additional materials listed may affect candidates being considered for the position.

  • Resume/CV

  • 3 work references with their contact information; at least one reference should be from a supervisor.

  • Letter of interest

Importantfor applicants who are NOT current university employees or contingent workers:You will be prompted to submit your resume the first time you apply, then you will be provided an option to upload a new Resume for subsequent applications. Any additional Required Materials (letter of interest, references, etc.) will be uploaded in the Application Questions section; you will be able to multi-select additional files. Before submitting your online job application, ensure thatALLRequired Materials have been uploaded. Once your job application has been submitted, you cannot make changes.

Important for Current university employees and contingent workers:As a current university employee or contingent worker, you MUST apply within Workday by searching for Find UT Jobs. If you are a current University employee, log-in to Workday, navigate to your Worker Profile, click the Career link in the left hand navigation menu and then update the sections in your Professional Profile before you apply. This information will be pulled in to your application. The application is one page and you will be prompted to upload your resume. In addition, you must respond to the application questionspresented to upload any additional Required Materials (letter of interest, references, etc.) that were noted above.

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Employment Eligibility:

Regular staff who have been employed in their current position for the last six continuous months are eligible for openings being recruited for through University-Wide or Open Recruiting, to include both promotional opportunities and lateral transfers. Staff who are promotion/transfer eligible may apply for positions without supervisor approval.

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Retirement Plan Eligibility:

The retirement plan for this position is Teacher Retirement System of Texas (TRS), subject to the position being at least 20 hours per week and at least 135 days in length. This position has the option to elect the Optional Retirement Program (ORP) instead of TRS, subject to the position being 40 hours per week and at least 135 days in length.

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Background Checks:

A criminal history background check will be required for finalist(s) under consideration for this position.

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Equal Opportunity Employer:

The University of Texas at Austin, as an equal opportunity/affirmative action employer,complies with all applicable federal and state laws regarding nondiscrimination and affirmative action. The University is committed to a policy of equal opportunity for all persons and does not discriminate on the basis of race, color, national origin, age, marital status, sex, sexual orientation, gender identity, gender expression, disability, religion, or veteran status in employment, educational programs and activities, and admissions.

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Pay Transparency:

The University of Texas at Austin will not discharge or in any other manner discriminate against employees or applicants because they have inquired about, discussed, or disclosed their own pay or the pay of another employee or applicant. However, employees who have access to the compensation information of other employees or applicants as a part of their essential job functions cannot disclose the pay of other employees or applicants to individuals who do not otherwise have access to compensation information, unless the disclosure is (a) in response to a formal complaint or charge, (b) in furtherance of an investigation, proceeding, hearing, or action, including an investigation conducted by the employer, or (c) consistent with the contractor's legal duty to furnish information.

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Employment Eligibility Verification:

If hired, you will be required to complete the federal Employment Eligibility Verification I-9 form. You will be required to present acceptable and original documents to prove your identity and authorization to work in the United States. Documents need to be presented no later than the third day of employment. Failure to do so will result in loss of employment at the university.

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E-Verify:

The University of Texas at Austin use E-Verify to check the work authorization of all new hires effective May 2015. The university's company ID number for purposes of E-Verify is 854197. For more information about E-Verify, please see the following:

  • E-Verify Poster (English and Spanish) [PDF]
  • Right to Work Poster (English) [PDF]
  • Right to Work Poster (Spanish) [PDF]

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Compliance:

Employees may be required to report violations of law under Title IX and the Jeanne Clery Disclosure of Campus Security Policy and Crime Statistics Act (Clery Act). If this position is identified a Campus Security Authority (Clery Act), you will be notified and provided resources for reporting. Responsible employees under Title IX are defined and outlined in HOP-3031.

The Clery Act requires all prospective employees be notified of the availability of the Annual Security and Fire Safety report. You may access the most recent report here or obtain a copy at University Compliance Services, 1616 Guadalupe Street, UTA 2.206, Austin, Texas 78701.

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